Electron Beam Lithography

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How does E-beam lithography work? What are the differences compared to photolithography?
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It's 2 AM and here I am learning about photolithography

watchspotting
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usually leaving a metal film pattern on silicon, first deposit a metal film on top of silicon substrate either PVD or CVD, then applied photo-resist on top of metal film, then define the pattern by lithography, then develop the photoresist, then etching process remove the unnecessary area, finally remove the resist film.

jerryyang
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Or even the specific pattern to diffract visible light. -Cloaking-

nighthawkviper
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Its a very good information and knowledge thank you sir

SarvanCreation
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Is this also known as "direct-etch lithography", or is that something completely different?

ChristianStout
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How did they developed the "resist" tool to print on the waifers in the first place?

grunty
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Hewlett Packard was doing this in the early 1980s!

mahoneytechnologies
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great job sir thank you very much for the great explanation

aymenbouhentala
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Great explanations, thanks! What software do you use to create these videos?

peymanfiroozy
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thank you very much for the video. Could you please tell me what are the reasons of the apparance of the stitching lines and why some lithography machines cause this problem and others dont cause this problem?? thank you!

cosanostra
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How are the masks printed so accurately?

donoik
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Easy to understand. What is used as substrate on which resist is coated? Thank you

santaislam
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Light can bend around small obstacles so how does photo lithography work because the mask would have super tiny details in it and light can just bend around it and fall all over the resist?

imqwerty
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Thank you sir. This is very useful in such a way like me also understable.

aravindbalakrishnan
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how much data as byte or bits as 1x1nm squares per eletron beam writing to manufacture a whole semi disc at one "write"?

Jkauppa
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Great way to make a smart skin for a WEAV

nighthawkviper
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👀👀👀 sounds like silkscreen printing tbh

NoReplyAsset
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I was lost in the first ten seconds! But still interesting

ichabodon
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NIL and X-ray lithography: Am I a joke for you?

ЕвгенийБагрянов-нэ
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So if EBL can go past 10nm why does Intel insist on EUV? Cost?

NickyNightShine