Making Tiny Things with Electron Microscope - E-beam Lithography

[Muonium]

cool! I'll try this with my antiproton synchrotron beam when I get home.

[kiaas]

I've known about this technique for years and thought about why no prototyping companies haven't just made something using it available for small projects, maskless, fast turn-around from design to real things. obviously not good for large volume production, but for prototype silicon, it just seems perfect.

[unclekyky]

That turned out much better than my first attempt at e-beam lithography -- and I was on a tool with commercial EBL hardware! You mention "special" e-beam resists, but what works best in my experience is PMMA. If you get a chance, try that out. Awesome project!

[leozendo]

These things are extream and deserve attention.

[vincei]

Very cool, Sam. Love the BurrBrown DAC's :-)
The wiring on the back of the microscope is a thing of beauty!

[nicknorthcutt]

Incredibly impressive man! I can't believe how good of a job you are doing considering how complex lithography can be.

[TestEric]

Mind blowing. Absolutely fantastic work.

[gustavgnoettgen]

A tiny tile with Nasca figures and a lens would be neat

[trey]

Wow! Good job! Last month, I learned about e-beam in my microfab class.

[dreggory]

You are a hero, I have been wanting to do this with my SEM too, but now I'm feeling more confident and inspired.

[drmosfet]

It's so sad to see good equipment get scrapped because it's not the latest and greatest, nice to see someone making good uses of it, and even taking it beyond original capabilities👍

[IlusysSystems]

That acetone developing makes kinda sense, assuming resist you used is phenol based, either light or high heat should cause resist to crosslink and possibly be completely resistant to solvents like acetone. Perhaps if you run beam over wafer twice or so it may give you more leeway for developing time


Edit: I commented too early as usual :P what happened there is obviously not what I described.. but interesting nontheless

[jelletje]

What is the overall size of the etch?
P.S. This is really cool.

[loovecraft]

I like the beam essentially being an antenna, an electron whisker.

[jameshicks]

Thanks for posting this! I am working on a planetarium projector with aluminized glass plates for the star masks. I am trying to get pinhole sizes down to 1 micron or finer.

[robertszempruch]

You've earn yourself a subscriber my friend! Really fantastic work you're doing. Can't wait for more!

[poptartmcjelly]

you could omit the beam blanker if you scanned the surface in a Z pattern.
Edit: no wait, this is not a laser, you can't turn the beam off that's what the beam blanker is for, nevermind. :)

[kentvandervelden]

Really wonderful to see a new video from you :)

[ThomasConover]

My dream have always been to visit a CPU manufacturer laboratory. This is amazing to see.

[welcome]

I installed the Joe Nabity ebeam system with blanking plates on many SEMs, including a 6400 at UCSD.