Drawing Microscopic Patterns with Electrons

Today we're looking at Electron Beam Lithography using a scanning electron microscope

🥰 CONSIDER SUBSCRIBING 🥰

==== More E-Beam Litho! ====
peterbjornx has recently been converting his SEM to run litho patterns. Particularly interesting since it's very DIY (vs the python api for my machine):

And of course the infamous Sam Zeloof did a video on the topic years ago 🙂

==== Never Gonna Give You Up :) ====

Kingdom power music

==== Timeline ====
0:00 Intro
2:02 Electron Beam Lithography
4:56 Substrate Choice
6:02 PMMA Resist
7:47 How do e-beam resists work?
9:35 Development
10:47 Results!
14:18 Dose Dependence
15:06 Resist Thickness
15:19 Substrate
15:22 Accelerating Voltage
16:03 Proximity Effect
17:06 Emission Current
17:35 SEM vs EBL
19:50 Fast Beam Blanker
21:13 PMMA dosing - Positive vs Negative resist
22:21 Next Steps
22:49 Curiosity Rover Wheel!

[AppliedScience]

Really cool stuff! I'm looking forward to the rover wheel design course.

[izzieb]

I used to watch pictures painted with electrons all the time. Now I'm watching this video, which is painted with electrons in a different way.

[friskydingo]

Thanks for the constant source of inspiration and information. You have inspired several projects over the years and provided a wealth of extremely useful information 👍

[HM-Projects]

Mixed feelings, I don't see many taps breaking in your videos anymore. I'm very glad that you're making these videos though 😘

[CharlesVanNoland]

My late father named his precision machine shop "Sub-Micron Precision". He wasn't doing anything that precise. We could hold +/-0.001" but his whole theory was that people would just hear the name and believe it. Miss you dad, wish you could see how far I've come on my own with CNC machines and life as a husband and father. RIP <3

[Mireaze]

I know this video took a while, but I'm glad you never give up, you never let us down

[MrApple-ywvp]

Ive been Rickrolled by an SEM image, nothing could prepare me for that...

[nathanwilson]

Amazing how far your home cleanroom has come! Some of the smallest features were probably washed away during development due to their high aspect ratio. I suggest a post-exposure bake unless you want to invest in a bottle of adhesion promoter.

[cdburner]

Fun fact about the rover wheels, the engineers at JPL were developing (though it didn't fly with curiosity) a modified wheel with a Raman spectroscopy sensor in it, where it would take continuous samples as the rover drove. Really clever. It was behind a sapphire (I believe) window.

[RobertElderSoftware]

This video has convinced me that the first practical homebrew DIY CPUs will be created using electron beam lithography instead of photo-lithography. The advantage of having a higher beam precision and not having to deal with unwanted exposures from lighting in the room would be a huge advantage. The disadvantage of much longer production times won't really be an issue when you are your own customer.

[joejane]

take all the time you need for content.
the mental health of our creators is worth it

[smellsofbikes]

Item 1 is how much I love the almost spy scene at the beginning matched with the googly eyes on all the equipment.
Item 2 is all the rest of it is just amazing.

[nonsquid]

With this resolution, you should be able to print a conductive tuned antenna array for a specific light wave frequency. For example, a blue laser with a known wavelength of 490nm would have a dipole antenna length of 490nm that would exactly absorb the coherent light energy and convert it to electrical power. Could you print a tuned array of 490nm dipoles then hit it with a blue laser to see what kind of conversion factor you would get? If you could print a whole array of different dipole antenna with lengths in the visible range, you could make efficient light collectors for detectors or possible power generation.

[notsonominal]

Oh, definitively take care of you first, youtube second - kudos for that and being open about it!<3

[HuygensOptics]

Glad you're back Zach! And on top of that with a lithography video, my favorite subject. Being Rick-rolled in that intro was great! 😃.

[WaffleStaffel]

Funny, I just today happened across Richard Feynman's *1959* lecture _"Nanotechnology, There’s Plenty of Room at the Bottom"_

[clint.]

You're videos are never too long! Yes, I may not watch them in one sitting, but I have ALWAYS finished them. Thank you so so so much for sharing explorations of these phenomena with us. I am entranced and truly enlightened while watching your videos. Don't ever stop sharing your incredible talents with the world! ...of course, do it on your own terms, at a healthy and sustainable pace. No one cares if you only post once in a while. Your videos display weeks and months and sometimes years of effort. I am rooting for you man!

[RichardGreco]

I did research in using MeV proton beams for lithography. Proton beam writing has advantages, high aspect ration (depth vs beam size, ~1 um^2 vs 60-100um depth). Accidentally created buried features, where the surface was under exposed (electronic stopping small) and the buried region was fully exposed (nuclear stopping high near end of range).

Ice cold 70% IPA is a amazing improvement. We used IPA/MIBK as a developer and had a hard time finding the perfect balance of dosing and developer, especially for deep feature.

[thereasoniswhatever]

My first run-in with this technology was when I was 13. It took me a while to understand how a microscope could be used to produce images instead of taking them. What helped me open my mind to the idea was a simple camera. If you have a camera it takes a picture, but if you were to shine an image out of the senzor you would literally get a projector. I know it is not the most acourate example, but it helped me understand how a taking device could be used to produce and image.

[CEOofLibertyMutualInsurance]

As someone who works in a materials characterization lab and is about to start a project with EBL, this video has been great for getting an idea of what I'm up against. TYSM!