CHRomatic Line Sensor CLS fast non contact inline inspection up to 1µm.

The CHRocodile CLS is industries best choice for fast, non-contact inline 3D inspection. It measures in the sub-µm range e.g coplanarity, topography and bump height even on highly reflective materials.

The CHRocodile CLS has an unparalleled lateral resolution of up to 1.0 µm and no shadowing due to perpendicular probe beams. The wide range of probes for the CHRocodile CLS offer you the choice of either a long line of up to 8 mm or a shorter line with an outstanding lateral resolution of up to 1 µm.

The robust and integrated design is ideally suited for easy integration into production-line inspection machines. By integrating high measuring speed and precision, the CHRocodile CLS opens up new dimensions in defect inspection of semiconductor wafer and chips, gap and offset of consumer electronics and thickness inspection of lenses and IOL´s.