3D Ion microscopy for tomography and sample reconstruction

The VELION FIB-SEM from Raith with a multiple ion source enables a unique workflow by employing heavy and light ions alternately for 3D ion microscopy. Bismuth ions, along with smart milling strategies, allow uniform sample delayering, Lithium ions enable damage-free imaging of the exposed structure. The top-down FIB geometry on a lithography platform easily enables the collection of high-resolution 2D images, which then can be stacked to create a 3D reconstruction of the sample.