3D NAND: Key Process Steps

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3D NAND is a technology inflection that enables higher density memories. Want to see how a structure is made? This video shows film stack deposition, channel hole etch, stair etch, slit etch, and word line fill – key steps in defining this innovative memory structure.

  1. Lam Research
  2. 3D Nand
  3. Lam Research
  4. Semiconductor manufacturing
  5. semincoductor technology
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