Micro Electro Mechanical Systems

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Comprehensive summary of micro/nano technology in fabrications.
Contributors are world-class experts in their research areas .
Continuous online updates and publication to provide up-to-date reference content.

Main Discipline: Engineering
  1. SpringerVideos
  2. Micro fluid
  3. RF MEMS
  4. actuators
  5. bio MEMS
  6. sensors
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