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Plasma-Therm Metal Etcher
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Operating Instructions of the Plasma-Therm Metal Etcher at the Stanford Nanofabrication Facility.
Chapter 1: Intro to PT-MTL: 0:09
Chapter 2: Prepare Tool: 0:41
Chapter 3: Load Wafer: 3:43
Chapter 4: Run Process: 4:17
Chapter 5: Unload Wafer: 6:32
For more information:
Chapter 1: Intro to PT-MTL: 0:09
Chapter 2: Prepare Tool: 0:41
Chapter 3: Load Wafer: 3:43
Chapter 4: Run Process: 4:17
Chapter 5: Unload Wafer: 6:32
For more information:
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