MEMS Switch Part 1

These MEMS switch are fabricated and characterized at the Centre for Nano Science and Engineering at Indian Institute of Science, Bengaluru. Actuation voltage less 10 V (4.8 V, 5.6 V, and 6.3 V) ; low insertion loss less than 0.6 dB and high isolation above 30 dB in the frequency range up to 40 GHz.