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High Aspect Ratio structures in semiconductor chips
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Process challenges associated with etching and filling high aspect ratio structures in semiconductor chips.
Stanford University's class on nanomanufacturing, led by Aneesh Nainani.
Oct 22, 2012
Week 5, Lecture 9, Part 1
Stanford University's class on nanomanufacturing, led by Aneesh Nainani.
Oct 22, 2012
Week 5, Lecture 9, Part 1
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