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Basic Principles Scanning White-Light Interferometry
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The topography measurement is based on a technique called white light interferometry that scans the surface height of the test object. To achieve this, a beam-splitter divides the beam coming from a white light source into two parts. The reference beam is reflected from a reference plane, while the measurement beam is incident on the test object. When changing the distance between the sample and the interferometer, optical interference occurs at every point of the surface where the optical path length is exactly the same for the reference and the measurement beam. During the vertical scan, the interference patterns are captured by the video camera while the software computes the topography from this data.
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