noc18-me69 Lecture 16

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This lecture module covers the following topics: Single crystalline silicon, Epitaxial silicon, Polysilicon, subtracting techniques: dry etching, physical chemical etching, etc.
  1. IIT KANPUR-NPTEL
  2. Silicon as MEMS materials
  3. Etching processes
  4. Anisotropic wet etching process
  5. Photolithography
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