H-Square: Low Contact Wafer Transfer - LCT1AS12-AC-005

H-Square Corporation

© 2012 H-Square Corporation

High Performance Wafer Handling Products:

LCT - 300mm LOW CONTACT TRANSFER SYSTEM
300mm low contact transfer machine provides safe means of mass transferring wafers from cassette to cassette. Wafers are gently lifted midpoint in the cassette slots before extracting or loading to minimize contact with the cassette which could cause particulation. Safety sensor detects wafers in the pod. Optional mapper available to detect cross slotted wafers. User-friendly fail-safe operation features simple one-button actuation. Small footprint saves valuable cleanroom space. Sturdy construction assures high reliability and robustness required in high throughput fabs. Unit is compatible with SEMI standard FOUPs and FOSBs. Class 1 cleanroom compatible. ESD safe construction.