Royce Fabrication and Nanopatterning Facilities at the University of Cambridge

A part of the Royce Cambridge Physical Vapour Deposition and Characterisation Facility, a state-of-the-art technology platform allowing for device fabrication and patterning of low dimensional materials and devices.

Equipment includes a dual-beam focussed ion-beam, an Ultra-Violet Mask Aligner Lithography tool and an Electron-Beam Lithography tool.