Fabrication of Micro and Nanostructures by Focused Ion Beam

Abstract: This talk highlights the research & development of focused ion beam (FIB) techniques for micro and nano structuring novel mechanical and optical devices. It presents a deterministic FIB fabrication approach with an effort to compensate the divergence errors associated with the FIB processing technique, such as beam overlap, angular dependence of the sputter yield and a level set approach to predict generated surface topography in consideration of the ion redeposition effects. It also presents a novel micro and nanostrcutring approach based on FIB induced bending mechanism which is a very promising technique to create free standing micro/nano structure of desired shape for the next generation micro/nano devices. The talk will include several case studies including FIB polishing optical fibre interferometer and FIB nanostructuring single crystal diamond tools for scale up manufacturing of nano-gratings.

Keywords: Microstructures, nanostructures, focused ion beam, sputter yield, beam bending.