Elements of AI in Optimization of SEM Operation

May 14, 2024 Colloquia Presenters
Department of Computer Science & Engineering

Elements of AI in Optimization of SEM Operation

Artificial Intelligence (AI) and machine learning (ML)are becoming intensely used in various fields of electron microscopy (EM). We focus on elements of ML in optimization of standard operation procedure (SOP) in scanning electron microscopy (SEM). There are many parts of routine SEM operation that are repetitive and very time consuming. Therefore applying computational automation methods can benefit routine operations. We review flow chart diagrams for the entire SOP to identify most compelling areas for automation: test sample positioning and standard pattern recognition for optimum performance evaluation.

RESEARCHERS: Krishnanujam S., Valley Christian High School '27; Neev T., American High School '27; Sophia H., Saint Francis High School '26; Amoug K., Irvington High School '27; Jeffrey M., Milpitas High School '26; Eshan G., Milpitas High School '27

ADVISOR: Starostina, Materials Science

KEYWORDS: Optimization Of Standard Operation Procedure | Artificial Intelligence | Machine Learning | Scanning Electron Microscopy