The Extreme Engineering of ASML’s EUV Light Source

After 20+ years of development, extreme ultraviolet lithography has become a commercial reality. As I write these words, multi-million dollar machines from ASML use EUV light to create impossibly small patterns in wafers.

This technological magic requires a powerful heart inside of it. And indeed, there is an amazing system driving ASML's $150 million lithography machine: The EUV Light Source.

In this video, we are going to look at the lasers firing pulses at tin droplets to create the powerful, 13.5 nanometer wavelength light for our latest, greatest microprocessors.

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[TheFulcrum]

As someone working at ASML, I can say this video is surprisingly accurate.

[Maadhawk]

This is truly an astounding machine. Kudos to all the scientists, engineers, mathematicians, chemists, and precision fabricators for pulling it off.

[jwbowen]

Wow. I'd heard the phrase 'tin droplets" associated with EUV, but I had no idea they were using one laser pulse to create a convex target for the main pulse. That's absolutely ridiculous.

[htomerif]

Your channel is one of the very few channels that bridges the gap between a good lay understanding of the semiconductor industry and a professional understanding of the semiconductor industry. Its a very rare thing to find in any field.

I find it interesting that the "secret" part of "trade secrets" is becoming less and less important as a smaller and smaller number of people or corporations or nations are actually capable of making use of those secrets.

I appreciate the explanations that companies like ZEISS give for the construction and function of their optical systems, but on its own it doesn't really increase your understanding of how the whole process works.

I get a lot of people in the maker space asking questions like "why can't we 3d print our own microchips". This is why. There's no half-assing an EUV light source. Similarly, there's no half-assing ultra-pure water or the purity and precision of reagents and gasses used in semiconductor manufacture. One microscopic droplet of process oil in a gas stream is enough to ruin a processor, or, worse, ruin a photo-mask.

If you're lacking for ideas for videos, one of the things I don't really understand well is how wafers are cut and polished. I'm assuming this has had to keep up with the process nodes as well.

[Jacmac]

As an ASML employee, I can say that Cymer deserves all the credit for the light source, that's pronounced Sy-Mir. Cymer began development of EUV from a design perspective back in the mid 2000s. The reason ASML bought Cymer is that the two companies required close cooperation to develop an EUV light source/scanner system and this was technically difficult because of responsibilities to keep technology secrets.

[htlhausi]

I heard the quote from an involved engineer that this machine is probably the most advanced piece of hardware ever contructed by a long shot.
The science and engineering involved in this is almost magic and the fact that it sattisfies serial productions demands is mindblowing.
ZEISS posted several videos explaining some of the science in detail if you're interested.

[BRUXXUS]

I has *NO* idea this is what it took to make EUV light for this manufacturing process. It's hard to believe, that out of all the people working on this, that this was the solution they landed on. Truly spectacular engineering and science. (if not straight up bonkers)

[rda]

This makes landing rockets sound like child's play! Mind blowing science and engineering!

[kuantumdot]

Thank you for putting this content together! This clearly shows the insane amount of engineering and science laying the behind the piece of electronics on our hands today.

[steeletait]

Hello! What a very well put together video I’m very impressed. I currently work for trumpf on the co2 drive laser. Ive sent this video to the recruitment agency who hired me they always send applicants videos like this to prep before hand

[eightmilesupwind]

The quality of videos from Asianometry has always been ASTOUNDING! The research thorough. The presentation clean and engaging. THANK YOU!

[jon]

Incredible video! I would say it's your best one until now. It's nice how you went super deep in the subject (for a youtube video) keeping everything clear. Props. Keep up the good work.

[Nodz]

What an amazing explanation of an incredibly complex process. For all the advances in computational modeling, there are still many applications where empirical experiments are still necessary, and it’s in this intersection of empirical and theoretical research that a lot of amazing solutions come up

[villageidiot]

While browsing Gigaphoton's site, its EUV is definitely different, as it's using magnetic fields to direct the tin debris/ions away from the mirror. But it lists a mirror lifespan of >3 months, how will it compare to ASML 1 year replacement life for its mirrors

[howyoudoin]

After watching almost all your videos I signed up to your newsletter. Your channel is amazing and your humour is so sharp 😂 I wish I could support you more. Keep up the great work. Cheers. Glen from Sydney.

[Noisy_Cricket]

The fact this works at all is mind blowing.

[asmael]

Totally insane. Everywhere else in physics, synchrotron radiation is appreciated for its narrow spectrum. But for this application, it has too wide of a spectrum. Incredible.

[jimturpin]

Wow! This video sort of flipped my world of understanding regarding chip manufacture upside down. We've come a long way since discovering fire and casting shadows on the cave wall.

[VS-isyb]

One of the most valuable videos of YouTube explaining critical technology. A cultural heritage of Humanity!

[doniherald]

this is the most detailed how ASML EUV works. finally i found it, thanks.